Elionix is a japanese supplier of electron-beam lithography systems. While for many years only active in Japan, where they dominate the market, they recently entered the US and Europe and have sold multiple systems to the world’s best universities. As an example, Harvard recently procured their third Elionix system.
In the NEXUS project, Elionix will team up with Beamfox to develop new and improved methods for nanofabrication of the spectrometer chips.
"The development of electron-beam lithography systems with both high resolution and high writing speed for mass production will be a game changer in the industry,” says Tetsu Wakamatsu, General Manager, Elionix.
Visit the Elionix website.